| Plasma Simulation Projects |
Projects on numerical plasma simulation, including HPEM code, Monte Carlo Module, and Feature Profile Model, developed at the Computational Optical and Discharge Physics Group, University of Illinois.
http://uigelz.ece.uiuc.edu/Projects/index.html
| Principles of Plasma Discharges and Materials Processing |
M. Lieberman and A. Lichtemberg. This book discusses the fundamental principles of partially ionized, chemically reactive plasma discharges and their use in thin-film processing among other applications.
http://diva.EECS.Berkeley.EDU:80/~lieber/Textbook2.html
| Plasma Engineering Group. IMAST Laboratory |
Plasma research group at the Sydney University, Australia.
http://www.ee.usyd.edu.au/IMAST/
Supplier of plasma etching systems, based in Carson City, Nevada. The web site includes company description and information on advantages of plasma technology and various plasma ap
plications.
http://www.plasmaetch.com/
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